AFM calibration
Company NT-MDT Spectrum Instruments supply with the full set of calibration standards for SPM lateral and vertical calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.
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Calibration grating TGQ1 is intended for simultaneous calibration in X,Y,and Z directions.
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Test grating TGT1 is intended for for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control.
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Calibration grating TGZ1 for SPM Z-axis calibration (step height 20,0±2nm).
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Calibration grating TGZ2 for SPM Z-axis calibration (step height 110±10 nm).
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Calibration grating TGZ3 for SPM Z-axis calibration (step height 520±20 nm).
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Test grating TGG1 is intended for SPM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, detection of angular distortion, tip characterization.
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Test grating TGX1 is intended for lateral calibration of SPM scanners, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip aspect ratio.
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