TGQ1
Test grating TGQ1 is intended for:
- simultaneous calibration in X, Y and Z directions;
- lateral calibration of SPM scanners;
- detection of lateral non-linearity, hysteresis, creep and cross-coupling effects.
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Grating description
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Structure
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- Si wafer
- the grating is formed on the layer of SiO2
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Pattern types
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3-Dimensional array of small rectangles
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Period
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3.0±0,05 µm
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Height
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20nm ±1,5 nm*
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Rectangles side size:
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1,5±0,35 µm
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Chip size
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5x5x0,5 mm
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Effective area
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central square 3x3 mm
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* the average meaning based on the measurements of 5 gratings (from the batch of 300 gratings) by SPM calibrated by PTB certified grating TGZ1. Basic step height can vary from the specified one within ±10% (for example step height can be 22±1.5nm)
Fig.1 SPM image of TGQ1 grating
