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TGZ1

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Calibration Grating TGZ1

Calibration grating  TGZ1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.

 

Grating description

Structure:

- Si wafer
- the grating is formed on the layer of SiO2

Pattern types:

1- Dimensional (in Z-axis direction)

Step height:

TGZ1 - 20,0±1.5 nm*

Period:

3±0,05 µm

Chip size:

5x5x0,5 mm

Effective area:

central square 3x3 mm


Fig.1 SEM photo of grating TGZ series 

 

* - the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm)

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