Grating sets
Company NT-MDT Spectrum Instruments offer three different grating sets.
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Grating set for Z-axis SPM calibration with three different height range - 20nm, 110nm, 520nm.
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Grating set for SPM lateral and vertical calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.
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Full set of calibration standards for SPM lateral and vertical calibration (including submicron calibration and simultaneuos calibration in X, Y and Z directions) , detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.
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Grating set for Z-axis SPM calibration with four different height range - 20nm, 110nm, 520nm, 1400nm.
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