TGG1
Test grating TGG1 is intended for:
- SPM calibration in X or Y axis;
- detection of lateral and vertical scanner nonlinearity;
- detection of angular distortion;
- tip characterization.
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Grating description
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Structure:
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the grating is formed on Si wafer top surface
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Pattern types:
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1- D array of triangular steps (in X or Y direction) having precise linear and angular sizes
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Edge radius:
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≤10nm
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Period:
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3±0,05µm
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Chip size:
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5x5x0,5mm
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Effective area:
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central square 3x3mm
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Fig.1 SPM image of TGG1 grating
