Grating set TGSFull consists of 8 calibration gratings - TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1, TGQ1.
Grating set TGSFull can be used for:
- SPM simultaneuos calibration in X, Y and Z directions;
- submicron SPM calibration in X or Y direction;
- lateral and vertical calibration;
- detection of lateral non-linearity;
- detection of hysteresis, creep, and cross-coupling effects;
- detection of angular distortion;
- for 3-D visualization of the scanning tip;
- determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.