NSG03/Au
High Resolution NONCONTACT "GOLDEN" Silicon Cantilevers NSG03 series with Au conductive coating |
PROBES GENERAL INFORMATION
NSG03/Au series specification
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Material
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Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped
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Chip size
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3.4x1.6x0.3mm
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Reflective side
|
Au
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Conductive coating
|
Au (35nm), Ti adhesion layer (25A)
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Cantilever number
|
1 rectangular
|
Tip curvature radius
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~ 35nm
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Also available coatings
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conductive TiN, PtIr
|
Available NSG03 probe
|
bare, tipless, with Al reflective coating
|
|
|
Cantilever series
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Cantilever length, L±5µm
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Cantilever width, W±3µm
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Cantilever thickness,
T±0.5 µm
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Resonant frequency, kHz
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Force constant, N/m
|
min
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typical
|
max
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min
|
typical
|
max
|
NSG03
|
135
|
30
|
1.5
|
47
|
90
|
150
|
0.35
|
1.74
|
6.1
|