CSG10/Pt
High Resolution CONTACT "GOLDEN" Silicon Cantilevers CSG10 series with Pt conductive coating |
PROBES GENERAL INFORMATION
CSG10/Pt series specification
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Material
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Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped
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Chip size
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3.4x1.6x0.3mm
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Reflective side
|
PtIr
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Conductive coating
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PtIr (25nm), Cr adhesion layer (25A)
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Cantilever number
|
1 rectangular
|
Tip curvature radius
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~ 35nm
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Also available coatings
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conductive TiN, Au
|
Available CSG10 probe
|
bare, tipless, with Al reflective coating
|
|
|
Cantilever series
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Cantilever length, L±5µm
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Cantilever width, W±3µm
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Cantilever thickness,
T±0.5 µm
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Resonant frequency, kHz
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Force constant, N/m
|
min
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typical
|
max
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min
|
typical
|
max
|
CSG10
|
225
|
30
|
1.0
|
8
|
22
|
39
|
0.01
|
0.11
|
0.5
|