CSG01/Au
| High Resolution CONTACT "GOLDEN" Silicon Cantilevers CSG01 series with Au conductive coating |
PROBES GENERAL INFORMATION
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CSG01/Au series specification
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TEM photo of CSG01/Au probe
Image courtesy of Denis Korneev, State Research Center of Virology and Biotechnogy (Vector)
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Material
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Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped
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Chip size
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3.4x1.6x0.3mm
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Reflective side
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Au
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Conductive coating
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Au (35nm), Ti (25A) adhesion layer
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Cantilever number
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1 rectangular
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Tip curvature radius
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~ 35nm
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Also available coatings
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conductivePtIr, TiN
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Available CSG01 probe
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bare, tipless, with Al reflective coating
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Cantilever series
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Cantilever length, L±5µm
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Cantilever width, W±3µm
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Cantilever thickness,
T±0.5 µm
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Resonant frequency, kHz
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Force constant, N/m
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min
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typical
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max
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min
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typical
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max
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CSG01
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350
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30
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1.0
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4
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9.8
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17
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0.003
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0.03
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0.13
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