HA_HR
Specification of HA_HR probe series
| Material |
Polysilicon lever,
monocrystal silicon tip
|
| Chip size |
3.6 x 1.6 x 0.4 mm |
| Reflective side |
Au |
| Cantilever number |
2 rectangular |
| Tip shape |
Octahedral at the base, conic on the last 200nm |
| Tip cone angle φ |
30 degrees on the last 200nm |
| Full tip height |
≥10 µm |
| Pedestal/tip ratio |
1:1 |
| Tip curvature radius |
less than 10nm |
| Cantilever type |
A |
B |
Typical dispersion |
| Length, L (µm) |
93 |
123 |
± 2 |
| Width, W (µm) |
34 |
34 |
± 3 |
| Thickness, H (µm) |
3 |
3 |
± 0.15 |
| Force Constant (N/m) |
34 |
17 |
±20% |
| Resonant frequency (kHz) |
380 |
230 |
± 10% |
