General Information

Substrate

· Standard chip size: 1.6x3.4x0.3 mm.

· Cross-section is trapezium-shape.

· High reflective chemically stable Au back side coating (reflectivity is 3 times better in comparison with uncoated probes).

· Compatible with the most of commercialAFM devices.

· The base silicon is highly doped to avoid electrostatic charges.

Cantilever

· Rectangular shape.

· Cross-section is trapezium-shape.

· Backside width is given in probes specifications.

· Available for contact, semicontact and noncontact modes.

· Tip is set on the controlled distance 5-20мm from the free cantilever end.

Tip

· Total tip shape is tetrahedral, the last 500nm from tip apex is conical.

· Tip height: 14 – 16 мm.

· Typical curvature radius:

- of uncoated tips 6 nm, guaranteed 10nm;

- of coated tips 35nm.

· Tip offset: 5 - 20 мm.

· Tip aspect ratio: 3:1 – 7:1.

· Front plane angle: 10°±2°.

· Back plane angle: 30°±2°.

· Side angle (half): 18°±2°.

· Cone angle at the apex: 7° - 10°.

Side View Sketch

Front View Sketch

“Golden” Silicon Probes are available:

· with Au and Al reflective coating

· with PtIr, TiN, Au, diamond doped conductive coating

· with CoCr magnetic coating

· with no coatings (bare)

· tipless

Probes are packaged in GelPak® boxes. (GelPak® is a registered trade mark of Vichem

Corporation)

Guaranteed product yield is better than 90%.

Available cantilever bent angle <2 degrees.

Warranty: 1 year for uncoated probes and probes with reflective coating

6 months for probes with conductive coating

3 months for probes with magnetic coating