TGX1

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Test Grating TGX1

Test grating TGX1 is intended for:

lateral calibration of SPM scanners;

detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;

determination of the tip aspect ratio.

Grating description
Structure	the grating is formed on Si wafer top surface
Pattern types	chessboard-like array of square pillars with sharp undercut edges
Period	3±0,05µm
Edge curvature radius	less than 10nm
Chip size	5x5x0,5mm
Effective area	central square 3x3mm
Height	0,6µm*

* - the dimensions marked * are given for information only.

Fig.1 SPM image of TGX1 grating