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Grating set TGS1F


Calibration grating set TGS1F is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 4 gratings TGZ1, TGZ2, TGZ3, TGZ4 with different step heights.


Grating description
Structure: - Si wafer
- the grating is formed on the layer of SiO2
Pattern types: 1- Dimensional (in Z-axis direction)
Step height: TGZ1 - 20,0±2 nm*
TGZ2 - 110±10 nm*
TGZ3 - 520±20 nm*
TGZ4 - 1400±10 nm*
Period: 3±0,1 µm
Chip size: 5x5x0.5 mm
Effective area: central square 3x3 mm


Fig.1 SEM photo of TGZ3 grating

* - the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm).

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