Calibration grating set TGS1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 3 gratings TGZ1, TGZ2, TGZ3 with different step heights.
||- Si wafer
- the grating is formed on the layer of SiO2
||1- Dimensional (in Z-axis direction)
||TGZ1 - 20,0±2 nm*
TGZ2 - 110±10 nm*
TGZ3 - 520±20 nm*
||central square 3x3 mm
Fig.1 SEM photo of TGZ3 grating
* - the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm)