NT-MDT Spectrum Instruments – research, production, sales and support  of wide range AFMs and AFM-Raman-Nano-IR Systems


Shopping cart


$200 (Add to cart)


Test Grating TGG1


Test grating TGG1 is intended for:
- SPM calibration in X or Y axis;
- detection of lateral and vertical scanner nonlinearity;
- detection of angular distortion;
- tip characterization.


Grating description


the grating is formed on Si wafer top surface

Pattern types:

1- D array of triangular steps (in X or Y direction) having precise linear and angular sizes

Edge angle:

70 degrees

Edge radius:




Chip size:


Effective area:

central square 3x3mm

Fig.1 SPM image of TGG1 grating


Copyright © 1998 - 2022, NT-MDT SI